Global Leader in ALD Technology
- PRODUCTS
- Solar Cell
- Lucida™ GS Series ALD
LucidaTM GS Series ALD
LucidaTMGS6000
ALD system for Silicon solar cell
Material：Al₂O₃, ZnO, TiO₂
Substrate size：≥ 156 x 156 mm wafer
PC based control system
High throughput：up to 6000 wafers/hour