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- Lucida™ M series ALD
LucidaTM M series ALD
LucidaTMM300
PEALD system for R&D applications
Material：Oxide, Metal, Metal Nitride……………
Substrate size：100~300mm wafer
PC based control system
Global Leader in ALD Technology
LucidaTMM300
PEALD system for R&D applications
Material：Oxide, Metal, Metal Nitride……………
Substrate size：100~300mm wafer
PC based control system