Global Leader in ALD Technology
- PRODUCTS
- Solar Cell
- Lucida™ TS Series ALD
LucidaTM GS-P Series ALD
LucidaTMGS-P360
ALD system for Perovskite solar cell
Material：SnO₂, NiO, Al₂O₃
Substrate size：≥ 360 x 360 mm glass
PC based control system
High throughput