Global Leader in ALD Technology
- PRODUCTS
- Solar Cell
- Lucida™ TS Series ALD
LucidaTM TS Series ALD
High throughput atomic layer deposition system for Cd free buffer layer of CIGS solar cells
LucidaTMTS series
Cluster system for LucidaTM TS series
Applications
- Cd free Buffer layer(ZnS,ZnOS..) of CIGS solar cells
- Applications of mass-product
- High throughput :>40 panels/hour (1PM)
- Substrate size :>900 x 1600mm2
Features
- Advanced process kit and small volume chamber for short gas cycle times
- Extremely materialized ALD mechanism
- Small foot print
- Totally integrated process module
- Easy process control
Technical Specifications
| Model | Material | Panel Size (mm2) | Thickness (nm) | Throughput(panel/hour) |
|---|---|---|---|---|
| LucidaTM TS600 | Zn(O,S) | >900x1600 | 30 | >40(1PM) |
| LucidaTM TS600-IN | Zn(O,S) | >900x1600 | 30 | >120 |