Global Leader in ALD Technology
- PRODUCTS
- Semiconductor
- Lucida™ S series ALD
LucidaTM S series ALD
LucidaTMS300
ALD cluster system for Semiconductor
Material：Al₂O₃, HfO₂, ZrO₂, TiO₂……………
Substrate size：300mm wafer
PC based control system
High throughput
LucidaTMS300i
ALD cluster system for Oxide semiconductor
Material：InGaZnO(IGZO)
Substrate size：300mm wafer
PC based control system
High throughput