Semiconductor

Lucida S series

Solar Cell

Lucida GS series

Display

Lucida GD series

R & D

Lucida D series

Lucida M series

Lucida C series

Lucida G series

Lucida P series

Lucida S series ALD

(new concept ALD system)

Applications

• High-k Dielectrics

: Al2O3, HfO2, ZrO2, TiO2, SrTiO3 ……

• 300mm wafers

• 100nm to ≤45nm devices

Benefits

• Applications for High throughput (>56wfs/hr)

Features

• ALD ultra-thin high-k dielectric  with good

 thickness uniformity and conformal step coverage

• Advanced process kit

• Extremely materialize ALD Mechanism

• Small foot print

• Totally Integrated process module