Semiconductor

Lucida S series

Solar Cell

Lucida GS series

Display

Lucida GD series

R & D

Lucida D series

Lucida M series

Lucida C series

Lucida G series

Lucida P series

Lucida™ GS series

Applications

• Surface Passivation of c-Silicon solar cells

• Applications of mass-product

Benefits

• High throughput
  : 1200(30MW) and 2400(50MW) of  156 x 156 mm2 wafers/hr

Features

• Advanced process kit and small volume chamber
for short gas cycle times

• Extremely materialize ALD mechanism

• Small foot print

• Totally integrated process module

• Easy process control

• Cassette to cassette operation

Technical specifications