Semiconductor

Lucida S series

Solar Cell

Lucida GS series

Display

Lucida GD series

R & D

Lucida D series

Lucida M series

Lucida C series

Lucida G series

Lucida P series

Lucida G series RTCVD

Applications

• Large area growth of Graphene

• >150mm wafers

Benefits

• Applications of R&D.

• Very low price

• Digital control of deposition parameters

• Control of heating and cooling time

• Control of gas saturation time

• Control of layer by layer (ALD mode)

Features

• High purity graphene growth

• Advanced process kit and small volume chamber
for short gas pulse time

• Small foot print(950X700mm)

• Totally integrated process module

• Easy process control with Delphi software

Graphene growth in 6" Ni/Si wafer by Lucida™ G series