Atomic layer deposition system for roll to roll applications |
Applications |
- Roll to roll ALD process for high moisture barrier films of flexible OLED displays, flexible OLED lightings, quantum dots, flexible solar cells, etc. : Al2O3,TiO2
- Applications for research and pilot-product
- Web width: <600mm
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Features |
- Advanced process kit for short gas cycle times
- High barrier property with polymer films
- Extremely materialize ALD mechanism
- Easy process control
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Technical specifications |
Model |
Material |
Web width
(mm) |
Lucida™ R 300 |
Al2O3,TiO2 |
<300 |
Lucida™ R 600 |
Al2O3,TiO2 |
<600 |
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