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High-k Dielectric
º»»ç´Â Lucida D200 ALD¸¦ ÀÌ¿ëÇÏ¿© Gate Oxide ¹× DRAM Capacitor¿ëÀ¸·Î »ç¿ëµÉ ´Ù¾çÇÑ High-k dielectric ¹°ÁúÀÇ °øÁ¤°³¹ßÀ» ¼öÇàÇϰí ÀÖ½À´Ï´Ù. ƯÈ÷ DRAM capacitor¿ë ZrO2, HfO2, TiO2, SrTiO3¡¦..µîÀÇ °íÀ¯Àüü ¹°Áú¿¡ ´ëÇÑ High throughputÀ» À§ÇÑ ALD Àåºñ °³¹ß°ú ´õºÒ¾î ÀÌ¿¡ ÀûÇÕÇÑ Precursor ¼±Á¤ ¹× °øÁ¤ °³¹ßÀ» µ¿½Ã¿¡ ¼öÇàÇÔÀ¸·Î½á ÀÚüÀûÀÎ ±â¼úÀ» È®º¸Çϰí ÀÖ½À´Ï´Ù.
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