Global Leader in ALD Technology
- PRODUCTS
- Industrial Coating
- Lucida™ GSH series ALD
LucidaTM GSH series ALD
LucidaTMGSH500
ALD system for Industrial coatings
Material: Al₂O₃, TiO₂, Y₂O₃, ZnO……………
Substrate size: various sizes
PC based control system
High throughput